PECVD & ICP-RIE Systems for the Nanoscale Fabrication Center

Estimated Value: $1,200,000
Open New 10 days left WisconsinEducation & Trainingrfq
Oct 12, 2026
Oct 23, 2026 12:00 AM
Education & Training
rfq
AI Summary
The University of Wisconsin-Madison is seeking bids for the acquisition of two advanced semiconductor fabrication systems: a plasma enhanced chemical vapor deposition (PECVD) system and an inductive coupled plasma - reactive ion etching (ICP-RIE) system, for use in their Nanoscale Fabrication Center.
Line Items
ItemQtyUnitEst. Unit PriceEst. TotalCategory
Plasma Enhanced Chemical Vapor Deposition (PECVD) System 1 each $600,000.00 $600,000.00 Other
Inductive Coupled Plasma - Reactive Ion Etching (ICP-RIE) System 1 each $600,000.00 $600,000.00 Other
Estimated Bid Value$1,200,000.00

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